Gas mass flow sensor is made of microelectromechanical system (MEMS) flow sensor chip, suitable for a variety of uses of clean, relatively dry gas flow measurement and process control, unique packaging technology makes the product meet different range of flow measurement, to ensure high sensitivity, high reliability, high stability and low cost.

It is composed of MEMS flow sensing unit and high precision digital processing and calibration circuit (MCU). The integrated Delta-σ A/D converter, the logic circuit with internal calibration function and MCU processor together ensure that the sensing signal is effectively collected in real time

The accurate flow signal is obtained, and the corresponding compensation algorithm is processed internally, so there is no need to do any external calibration compensation, it can ensure high precision flow output; Friendly digital output communication mode, users can be very convenient to get the corresponding data and information; Product application range is very broad.